High-kHf-based layers grown by RF magnetron sputtering
نویسندگان
چکیده
منابع مشابه
Nanocrystalline GaN and GaN:H Films Grown by RF-Magnetron Sputtering
The structural and optical properties of nanocrystalline GaN and GaN:H films grown by RF-magnetron sputtering are focused here. The films were grown using a Ga target and a variety of deposition parameters (N2/H2/Arflow rates, RF power, and substrate temperatures). Si (100) and fused silica substrates were used at relatively low temperatures (Ts ≤ 420K). The main effects resulting from the depo...
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Silicon-rich Al2O3 films (Six(Al2O3)1-x) were co-sputtered from two separate silicon and alumina targets onto a long silicon oxide substrate. The effects of different annealing treatments on the structure and light emission of the films versus x were investigated by means of spectroscopic ellipsometry, X-ray diffraction, micro-Raman scattering, and micro-photoluminescence (PL) methods. The form...
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ژورنال
عنوان ژورنال: Nanotechnology
سال: 2010
ISSN: 0957-4484,1361-6528
DOI: 10.1088/0957-4484/21/9/095704